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Etch selectivities of mask materials for micromachining of ultrananocrystalline diamond film

Abstract

Journal of Ceramic Processing Research

Journal of Ceramic Processing Research

Journal of Ceramic Processing Research

Lab. of Ship Resistance & Performance, Dept. Naval Architecture and Ocean Engineering Pusan Nation University

Professor : In-won Lee · Tel : +82-51-510-2768

Adress : 2, Busandaehak-ro 63beon-gil, Geumjeong-gu, Busan, Republic of Korea

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